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¶ÇÇÑ °¡½ºÀÇ outlet thread(Ãⱸ³ª»ç)´Â °¡½ºÀÇ Á¾·ù¿¡ µû¶ó °¡¿¬¼º °¡½º´Â Á³ª»ç (
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Valve
type
|
Material
|
Usage
|
Example
|
Diaphram (packless) KSA JIS DISS CGA
|
Brass
|
Non-corrosive
UHP gases and standard
gases
|
e.g.
AsH3, B2H6, PH3
|
Ni-plated
|
Specialty
gases such as electronic & mixed gases
|
e.g.
WF6, HF etc.
|
SUS
|
Corrosive
UHP & mixed gases
|
e.g.
NH3,
NO, BF3, PH3, SiF4
|
Packed
KSA JIS DISS CGA
|
Brass
|
Non-corrosive
compressed &
mixed gas
|
e.g.
N2,
Ar, CO, C3H8, He etc.
|
Ni-Cr
plated
|
Mild
corrosive mixed gas
|
e.g.
NO/N2,
H2S/N2, SO2/N2 µî
|
SUS
|
UHP
& mixed gas for semiconductor Industry
|
e.g.
N2, Ar, He, SO2,
NOx, MeSH, TMA
|
|